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MEMSnet Home: MEMS-Talk: Spinning AZ4903 Photoresist
Spinning AZ4903 Photoresist
2006-03-23
Po-Jui Chen
2006-03-23
abdou sar
Spinning AZ4903 Photoresist
abdou sar
2006-03-23
Hi PJ,
You can use plastic pipette (7 ml) normally you will not have bubbles.

abdou.

>From: "Po-Jui Chen" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] Spinning AZ4903 Photoresist
>Date: Thu, 23 Mar 2006 11:03:04 -0800
>
>Hi all,
>
>I recently started to try AZ4903 photoresist in order to coat thick PR
>films. I found that it is much more viscous than other types such as
>AZ1518, AZ4620, so I always had bubbles when dispensing the
>photoresist directly by pouring it on wafers. Do you any suggestions
>about the best way to dispense it? Our spinner does not have a spray
>function so this method is not available...
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