I am doing some simulation using ANSYS for torsional micromirror and capacitive
sensors. I have seen big discrepancy in actual operation frequency/speed with
the simulated ones without taking damping into account. Any one can help in how
the ambient damping would be Incorporated into the simulation and what the value
it should be, Or any one can provide information about this. Thanks.
Terry Zhu
email: [email protected]