Are you willing to grind the slope?  The 5 um width is a little scary but the
rest seems pretty straight forward.

Roger Brennan
Solecon Labs

-----Original Message-----
>From: "[email protected]" 
>Sent: Apr 19, 2006 6:44 PM
>To: [email protected]
>Subject: [mems-talk] Silicon Ramp Needed
>
>OK Mems people, work with me. This is a real question.  How can I make a
>silicon ramp 5um tall on one end and 1um on the other, 250um long, 5um
>wide?  I'm starting with a 5um layer of Si on a substrate.  The real
>question is how to etch/make a smooth, ramp, type structure.  I feel a few
>lith steps of 1um 4 times to build "stairs" and then figure a way to smooth
>the 1um steps.  Anyone????