Hi,

Try Prof. Marty Afromowitz at Univ. of Washington he has done ramps using gray
scale litho. If you have a resist ramp an ddo a RIE the ramp will transfer to
the Si.

Rick Morrison
Draper labs


-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of [email protected]
Sent: Wednesday, April 19, 2006 9:45 PM
To: [email protected]
Subject: [mems-talk] Silicon Ramp Needed

OK Mems people, work with me. This is a real question.  How can I make a silicon
ramp 5um tall on one end and 1um on the other, 250um long, 5um wide?  I'm
starting with a 5um layer of Si on a substrate.  The real question is how to
etch/make a smooth, ramp, type structure.  I feel a few lith steps of 1um 4
times to build "stairs" and then figure a way to smooth the 1um steps.
Anyone????