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MEMSnet Home: MEMS-Talk: Germanium wet etch
Germanium wet etch
2006-07-06
Andrea Mazzolari
2006-07-07
Nels P. Ostrom
2006-07-08
Andrea Mazzolari
Germanium wet etch
Andrea Mazzolari
2006-07-06
Hi all. I'm looking for infomations about wet etch of germanium.
Until now i've found only this

http://www-bsac.eecs.berkeley.edu/archive/john_heck_phd.pdf

Can someone give me other references ?

Thanks in advance.
Andrea

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