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MEMSnet Home: MEMS-Talk: Spin coating very thin PDMS film
Spin coating very thin PDMS film
2006-07-17
nwu
2006-07-17
Bruce Altemus
Spin coating very thin PDMS film
nwu
2006-07-17
I am wondering how to spin coating a very thin and uniform layer of PDMS
on silicon surface.  The thickness is about 150 - 300 nm. What kind of
solvent should I choose?  I used hexane before, but it does not give me
uniform surface during spin coating. Thanks

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