Hi, friends,
Is there anybody who has experinece on making anodic aluminum oxide(AAO)?
I want to transfer the pattern of the AAO to silicon dioxide using dry etching,
so i need to remove the barrier layer at the bottom. I tried several methods
such as 30degreeC H3PO4 20min. But it didn't work.

Another question is how to clean the film after strip off from the film. I use
HgCl2 to strip the AAO film from the film, but it is dirt. It is difficult to
clean up. is there anybody has any experience?
Thank you. Have a good day.

University of California,Irvine
B.Frank
[email protected]
2006-07-18