You can find such details in the following paper:
"Three-dimensional micro-channel fabrication in polydimethylsiloxane
(PDMS) elastomer", Jo, B.-H.; Van Lerberghe, L.M.; Motsegood, K.M.;
Beebe, D.J., JMEMS, Vol 9,  Iss 1,  2000 pp. 76 - 81
There has been some discussion of PDMS plasma bonding recently so also
have a look at the archives.


Philip D. Hewes wrote:
> Hello all,
> My question is concerning PDMS oxidation by plasma cleaning and
> subsequent conformational bonding, see Duffy et al (Anal. Chem.
> (70)23:pg 4974). They used a Harrick PDC-23G (now PDC-32G), which I do
> not have access to. Has anyone found wattage/pressure/flowrate
> settings that can replicate the resulting bonding?