A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Gas mixing chamber
Gas mixing chamber
2006-08-23
amron gary
2006-08-24
Brent Garber
2006-08-24
Ian Burnett
2006-08-24
Matthew Coda
2006-08-24
Michael D Martin
Gas mixing chamber
amron gary
2006-08-23
Hello:

I have a 10"x1" gas mixing chamber. My diffusion gases
are N2 and C2H2. Currently, gas mixing chamber is at
ambient. I want to keep the temperature of my gas
mixing chamber around 100 deg C in order to have
better diffusion of gases before they go to the PVD
chamber. Are there any heaters or heating techniques
that I can use outside my PVD to keep this gas mixing
chamber hotter than ambient? Thanks in advance.

Gary
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Nano-Master, Inc.
Addison Engineering
The Branford Group