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MEMSnet Home: MEMS-Talk: PMMA bonding with su8
PMMA bonding with su8
2006-10-06
jianshi
PMMA bonding with su8
jianshi
2006-10-06
Hello

If any one can tell me ,how to make bonding of PMMA  and su8 resist?

thanks

SHI JIAN
CNRS UMR 8640 PASTEUR
Département de chimie
Ecole normale superieure
24, rue Lhomond, F-75231 PARIS cedex 05
FRANCE
Phone: + 33 (0)1 44 32 2421
Fax: + 33 (0)1 44 32 24 02





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