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MEMSnet Home: MEMS-Talk: Spin On Passivation (glass or polyimide)
Spin On Passivation (glass or polyimide)
2006-10-06
Lou Chomas
Spin On Passivation (glass or polyimide)
Lou Chomas
2006-10-06
Hi,
    I'm looking for a supplier of spin on glass or polyimide.  I'd like
thicker layers (>2 um) if possible and a process that keeps the wafers at
reasonable temperatures (CMOS compatible; <400-500C).  Does anyone know who
I might be able to order these materials from?

Thanks!

Lou Chomas

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