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MEMSnet Home: MEMS-Talk: Photolithography, baking temperature
PECVD SiN at temperature 250℃
2007-01-02
memser
Photolithography, baking temperature
2007-01-03
jpt sharma
Photolithography, baking temperature
jpt sharma
2007-01-03
HI All
Is there any photoresist which needed about 75C baking temperature ?
I want to to photolithography with image reversal but can't bake the resist
above 75C.
Look forward to hearing from you guys.

JPT
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