PZT can be etched using hydrofluoric acid (HF) (+ HCl+H2O)

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From: Dr Nicolas Felix [mailto:[email protected]]
Sent: Sun 28/01/2007 22:27
To: [email protected]
Subject: [mems-talk] best etching for PZT



I'm looking for dry or wet etching of PZT piezoceramics, do you have any
idea or references for this particular topic.

Regards

Nicolas