Hi,
I am attempting to use uncrosslinked SU-8 as a sacrificial layer.  In my
process, I will need to evaporate Titanium or Chromium of about 30-50nm on the
SU-8 to serve as a UV blocking layer as well as an adhesion layer for Gold
conductor to be photolithographically patterned later.

I have tried to thermally evaporate Titanium granules (0.5-2mm) and even
Chromium in a BOC Edwards Auto 306 before.  These attempts prove difficult
because either the rate is very slow or the metal does not evaporate even at
currents of 48mA and at process pressures of 5e-6 millibars!

Thus I will be attempting to use e-beam evaporation to evaporate either Titanium
or Chromium on uncrosslinked SU-8.  Does anyone have any experience whether
e-beam evaporation at low enough currents will cause SU-8 to be exposed?

Mr. Jeffrey Mun Pun YUE
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  [email protected]