Hi,
Has anyone coated and baked SU-8 on borosilicate glass wafers?  Silicon has a
thermal conductivity of 130W/m.K, while borosilicate glass has a thermal
conductivity of 1.4W/m.K.  So for the same baking time on Silicon, glass needs
about 100 times longer baking time on the hot plate.
Can anyone advise me if I were to coat SU-8 on glass wafers?

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  [email protected]