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MEMSnet Home: MEMS-Talk: Using Chromium or Titanium thin film as a mask for Gold wet etch
Using Chromium or Titanium thin film as a mask for Gold wet etch
2007-03-27
Yue Mun Pun, Jeffrey
Using Chromium or Titanium thin film as a mask for Gold wet etch
Yue Mun Pun, Jeffrey
2007-03-27
Hi,
I intend to pattern a layer of about 10nm of either
 Chromium or Titanium via evaporation and lift-off on 200nm of Gold to etch away
the underlying gold film to create the same pattern as the Chromium or Titanium
patterns.  I understand that there will be an undercut using wet etch
chemistries such as dilute Aqua Regia.  However, I have also read that Chromium
has pinholes.

Has anyone done this process before and any idea how to resolve the pinhole
problem?  Or is Titanium a better film to use?

Jeffrey
reply
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