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MEMSnet Home: MEMS-Talk: PDMS is sticking better on SiO2 or on rezist ? or directly on Glass sputtered with gold?
PDMS is sticking better on SiO2 or on rezist ? or directly on Glass sputtered with gold?
2007-03-27
Petru Lunca Popa
PDMS is sticking better on SiO2 or on rezist ? or directly on Glass sputtered with gold?
Petru Lunca Popa
2007-03-27
HI Guys
I am trying to put some PDMS on a chip . The chip is a Si wafer having
some Au lines 50 um wide and 100 nm height ( litography) For plating I
need to stick some PDMs patterned with channels on top. I tryied
directly but is not sticking so I will  cover all with rezist or Si O2
.. On which one PDMS is sticking better? ANy ideeas?
Thanks
Petru
Strasbourg. France
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