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MEMSnet Home: MEMS-Talk: UV LED light source
UV LED light source
2007-03-27
Jim Beall
UV LED light source
Jim Beall
2007-03-27
Hi all,

We are exploring buying a new mask aligner/bond aligner and wonder if
anyone has any experience (good or bad) with the new 365 nm UV LED
light source offered by EV Group as a replacement for the Hg arc lamp
source?

Thanks,

Jim
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