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MEMSnet Home: MEMS-Talk: silicon wet etch surfactants
T-Gate Lift off
2007-03-27
Noemi Graziana SPARTA'
2007-03-27
[email protected]
silicon wet etch surfactants
2007-03-27
Andrea Mazzolari
silicon wet etch surfactants
Andrea Mazzolari
2007-03-27
Hi all, i need to realize etching of (110) silicon wafers.
Etch is limited by (111) walls, i need to obtain very low surface
roughness on both (111) and (110) surfaces. Is there any surfactants which
could help ?

Best regards,
Andrea
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