This has been discussed here before so you can check the archives. I've
attached a post with a good reference for the bonding.
In short you will have to develop your own process as there are so many
variables. I have found the most important step is to heat it on a
hotplate at 85C after bonding. This gives me 100% bonding success (so
long as no dust gets in between).

Petru Lunca Popa wrote:
> Hi guys
> Can you please help with this
> So I need the exact way to a perfect stick PDMS on SiO2 and on glass (
> a link to some articles maybe) The exact times for plasma cleaner ,the
> power .....
> Also did anybody have a link to a method to deposit PDMS by
> evaporation with cyclohexane?
>
See this paper for some good tips on bonding and surface
preparation/cleaning:

*Three-dimensional micro-channel fabrication in polydimethylsiloxane
(PDMS) elastomer*
Jo, B.-H.; Van Lerberghe, L.M.; Motsegood, K.M.; Beebe, D.J.;
Microelectromechanical Systems, Journal of

Volume 9,  Issue 1,  March 2000 Page(s):76 - 81
Digital Object Identifier 10.1109/84.825780