hi,

my guess is that at 100nm separation van der waals forces are not
insignificant (or i think, strictly speaking, the "retarded van der
waals" or casimir force).  i would think about the magnitude of the
force involved vs. the spring constant of the cantilever.

see this paper for example:

http://www.nature.com/nmat/journal/v4/n8/full/nmat1431.html

nate

"Yue Mun Pun, Jeffrey"  wrote:

> Hi,
> I would like to know if anyone has faced any stiction problems of a
> SU-8 cantilever released from a 100nm Chromium film via Chromium
> etch, with the substrate being also SU-8?  My thought is that since
> SU-8 is hydrophobic, there should be much of a stiction problem if
> both the cantilever and the substrate are made of SU-8, even though
> the space between them is 100nm, right?

nate lipkowitz
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