Anna,
Do let us know the result of your experiments. =20
=20
I am also working with multiple layers of SU-8 but I am building a =
free-standing 2-arm in-plane actuator on uncrosslinked SU-8 as a =
sacrificial layer, so that's why I need to use a UV blocking layer such =
as Chromium, for example.
=20
Jeffrey

________________________________

From: [email protected] on behalf of Dubnisheva, Anna
Sent: Wed 4/25/2007 10:14 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Multi layer SU-8 process

Thank you to everyone who replied to my previous e-mail!
I will be ordering an UV filter this week and will try the same =
processes I did before with a filter and see if I will get any good =
results.
Those 10 um holes I'm making are suppose to go all the way through 10 um =
thick layer of SU-8 2010 and stop on the SU-8 layer 2100 (100 um thick). =
Since I have already exposed the bottom layer it would be no problem to =
make these holes open through 10 um deep. The only problem I have is =
make these holes nicely open! The final three layer SU-8 structure will =
be a mold for PDMS and it is important to have 10um holes open.
Speaking of using hot plates - I tried that, too, but didn't use slow =
ramping up or down during the bakes. I may have to try that.
Thank you again to everyone and if you will have more advice for me I =
would greatly appreciate it.