A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Quartz Etching
Quartz Etching
2007-05-17
Sreemanth M Uppuluri
2007-05-17
Gareth Jenkins
2007-05-17
Bill Moffat
2007-05-18
Andrea Mazzolari
2007-05-18
Kirt Williams
XeF2 Etching Silicon
2007-05-18
Bin Liu
2007-05-18
ChungHao Chen (Joseph)
2007-05-18
P.D. Floyd
2007-05-18
Kirt Williams
Fused Quartz Cleaning
2007-05-30
Sreemanth M Uppuluri
2007-05-30
Julie Houser
2007-05-31
shay kaplan
2007-05-21
Nodes Norbert
Quartz Etching
Bill Moffat
2007-05-17
Streemanth,
           Vacuum dehydrate and vapor HMDS deposit in vacuum vapor
prime.  It holds up to more than a 30 minute etch in BHF. If moisture
enters the equation the resist lifts in minutes.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353
[email protected]
www.yieldengineering.com
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Addison Engineering
MEMS Technology Review
University Wafer