I will check
1, gas, almost finished gas will cause the same problem;
2. target position, contact, polish the surface if dirty
3. magnet, old magnet for magnetic material like nickel may lose its ability
4. electronic system for DC voltage application, measure it if it is correct

that is what I have thought of.
jim

On 8/2/07, Brent Garber  wrote:
>
> Saravan,
>
> Is your system a DC magnetron sputterer?   If so, have you changed your
> target's position?  I did that once and the magnet in the other position
> was not as strong and I was unable to get a plasma.  Also have you
> changed your spacing from your target to your sample?  You should have
> some type of ion capture shield around the rim of your target.  Is that
> spaced correctly?  And lastly, are you using the same gas pressure as
> before?