Re: Any suggestions on through holes on Glass pyrex
7740
David Nemeth
2007-08-06
For steep sidewalls, you can also use laser drilling or FIB milling. There
are several companies that will do this on an outsource basis.
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Steven Yang
Sent: Wednesday, August 01, 2007 6:05 AM
To: [email protected]
Subject: [mems-talk] Re: Any suggestions on through holes on Glass pyrex
7740
The thickness of glass wafer is 500 micron. I am wondering how much
will the aspect ratio if using HF etching?