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MEMSnet Home: MEMS-Talk: Plating of small cavities
Plating of small cavities
2007-09-18
P.E.M. Kuijpers
Plating of small cavities
P.E.M. Kuijpers
2007-09-18
Dear All,

I want to plate very small cavities (200nm diameter and 500nm deep) with a
conductive material.
Can this been done by electro- or Eless plating?
Or must we use a sputter or evaporation process?

Thanks in advance.

Peter Kuijpers
MiPlaza
DTS/TFF
High Tech Campus 04
Room: WAGp5-11
5656 AE Eindhoven
The Netherlands

Phone.:  (+31 40 27) 98904 (mobex)
mobile:(+31) 06-12507027
fax.:     [+31 40 27) 44769
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