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MEMSnet Home: MEMS-Talk: Poly Silicon Resistivity
Poly Silicon Resistivity
2007-09-27
Rana, Mukti M
2007-09-27
Suraj Patil
2007-09-28
Thomas Wolff (WEP)
Poly Silicon Resistivity
Rana, Mukti M
2007-09-27
Hello,

Can anyone suggest me the variation of resistivity of polysilicon with
doping concentrations? Reference of any paper or article will be
appreciated. Thank you.

Mukti M Rana


reply
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