Hi, guys.

 I am researching modeling of a kind of MEMS actuator.

 I have studied it theoretically and verified it with MEMS simulator,
Coventorware 2006.

 In a certain condition, not all, my results do not agree with the FEM
simulation.

 People around me recommend other simulator, Ansys.

 Is there any difference between Coventorware and Ansys with respect to
the accuracy?

 Thank you in advance.

 Minwu Kim, MS Candidate


 3D Micro-Nano Structures Lab.
 Div. EE, Dept. EECS, KAIST
 373-1 Guseong-dong, Yuseong-gu,
 Daejeon 305-701, Republic of Korea