A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: get a thin oxidation layer
Re: get a thin oxadation layer
2007-10-30
Ning Wu ([email protected])
Re: get a thin oxidation layer
2007-10-30
Gary Hillman
Re: get a thin oxidation layer
Gary Hillman
2007-10-30
Ning Wu,  You might try high pressure steam oxidation, you could achieve
several bar at reasonable temperatures.  Steam is a very aggressive oxidant,
and something as simple as a pressure cooker might do your job.  Easy and
cheap to try.  Gary

Gary Hillman
Service Support Specialties, Inc.
PO Box 365
9 Mars Court
Montville, NJ 07045
Telephone 973-263-0640 extension 35
Fax 973-263-8888

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
Harrick Plasma, Inc.
University Wafer