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MEMSnet Home: MEMS-Talk: a question about KOH etch back
a question about KOH etch back
2007-11-05
Chin-Jen Chiang
2007-11-05
Andrea Mazzolari
2007-11-05
[email protected]
2007-11-05
Chin-Jen Chiang
a question about KOH etch back
Chin-Jen Chiang
2007-11-05
Hi guys,

I am trying to etch back a Si bulk with KOH to remain a ~10 um thick membrace
wirh an area of 0.5mm x 0.5mm. I am concerned if such a thin membrance with such
a big area is very fragile and if it is achievable. Someone told me such a thin
Si layer is not flexible as a thin nitride layer. Is that true? I appreciate
your advices.

Lawrence
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