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MEMSnet Home: MEMS-Talk: Best resist for HF etching
Best resist for HF etching
2007-11-15
Michael A Gingras
2007-11-16
Edward Sebesta
2007-11-16
Bob Henderson
2007-11-17
Bill Moffat
2007-11-16
Mikael Evander
2007-11-16
Andrea Mazzolari
2007-11-16
Mikael Evander
2007-11-16
Michael Larsson
2007-11-16
Haixin Zhu
2007-11-17
Carlo Webster
2007-11-17
Andrea Mazzolari
2007-11-16
Mikael Evander
2007-11-17
Michael Larsson
Best resist for HF etching
Andrea Mazzolari
2007-11-17
Hello Carlo,
can ProTEK A2 be patterned ? From this page,
http://www.brewerscience.com/?id=587
it seams that ProTEK A2 is not photosensitive. So how do you suggest to
ues it ?

Another question: do you have any informations about resistance of ProTEK
A2 to BOE etch (1 part of HF and 7 parts of NH4F) ?

Best regards,
Andrea

> I think you need to use ProTEK A2 with a resist. ProTEK A2 will will
> resist
> 49% HF for 60-90 minutes.
>
> Do a google search for it.
>
> Carlo Webster
reply
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