>Hi all,
>I wonder if there is any kind of photoresist (or any kind of  chemical
>that can be spinned and cured)
>that can be etched by XeF2 ?
>Has anybody observed any other material reacting with XeF2 other than
>Si, Poly, some Si3N4's and a few well known metals ?
>Thanks..

I'm not sure, but you may want to try a new UV cure epoxy available from
Epoxy Technologies.
                                                                Justin.
Justin D. Mansell                | "If your opponent strikes with fire,
Ginzton Laboratory               |         counter with water."
Stanford, CA 94305               | "To injure an opponent is to injure
tel: 650-725-2266                |          yourself."
fax: 650-723-2666                |              -Morihei Ueshiba
http://www.stanford.edu/~jmansell|