Dear MEMS Researchers,

I am trying to deposit (sputter/evaporate) 500 nm chrome on polymer
(photoresist, polyimide) but I get cracks in the metal layer. Can
someone give me some ideas/tips how can I obtain a good metal layer?

Thank you,

Cristina Neagu





Cristina Neagu
Associate Researcher
MESA Research Institute
University of Twente-TDM
P.O. Box 217, 7500 AE Enschede
The Netherlands
Phone:  x31-53-4892805
Fax:  x31-53-4893343
email: [email protected]