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MEMSnet Home: MEMS-Talk: PR removal after ICP RIE etching
PR removal after ICP RIE etching
2008-05-20
Satish Yeldandi
2008-05-20
Andrew Sarangan
2008-05-20
Satish Yeldandi
2008-05-20
Ngo Ha Duong
2008-05-20
Tolga YELBOGA
2008-05-20
Oakes Garrett
2008-05-21
Jason Milne
2008-05-23
Jie Zou
2008-05-23
乔大勇
PR removal after ICP RIE etching
Satish Yeldandi
2008-05-20
Thanks for the reply.I am using AZ 5214E and AZ P4400 photo resists.

On Tue, May 20, 2008 at 10:05 AM, Andrew Sarangan  wrote:
> What type of photoresist?
>
reply
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