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MEMSnet Home: MEMS-Talk: PDMS to PDMS oxygen plasma bonding
PDMS to PDMS oxygen plasma bonding
2008-07-02
Jose Guevarra
2008-07-02
Joshua Tice
2008-07-04
Liang Zhao
PDMS to PDMS oxygen plasma bonding
Liang Zhao
2008-07-04
yes, it works

2008/7/2 Joshua Tice :

> Hi Jose,
>
> Yes, although in my experience, it doesn't always work as consistently.  I
> always heat my devices afterward to improve the seal (usually 65 C for an
> hour).
>
> When sealing PDMS to PDMS, you can also use different ratios of curing
> agent
> in each layer to create a seal.  See Quake et al.'s paper:
> http://www.sciencemag.org/cgi/content/full/288/5463/113
>
> Josh

--
赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University
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