The Semi-Std for 150 mm wafers is 60um max for Bow and Warp. Semi-M1.8

-----Original Message-----
>From: John-Rolf Oakley 
>Sent: Oct 1, 2008 5:32 PM
>To: [email protected]
>Subject: [mems-talk] wafer bow spec
>
>Hello,
>
>I am having trouble keeping vacuum on some wafers and I was wondering if anyone
could tell me what the SEMI standard for wafer bow is on 6", 675um, single flat,
single side polished, <100>, P type Si?
>
>Thanks

Kmbh Technologies
[email protected]
47 Rocket Circle  Rancho Cordova, CA  USA  95742
Phone +1 510-714-5055 FAX+1 510-217 4421
Standard and Specialty CZ and FZ Silicon, Glass and other wafers.