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MEMSnet Home: MEMS-Talk: Any sources for Silicon Nitride?
Any sources for Silicon Nitride?
1998-02-18
Joseph Su
Any sources for Silicon Nitride?
Joseph Su
1998-02-18
Hi folks,
I wonder if anyone knows how to grow low stress silicon nitride
for Xray mask membrane use?  Or if anyone knows places that can grow high
quality low stress silicon nitride membrane for a cost?  Any info is
appreciated and can help out all UW-Madison X-ray research groups greatly.

Thanks
Joseph Su


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