When I need to keep wafers in horizontal position during etch I just turn
regular wafer boat/cassette 90 degrees and submerge wafers in the solution
this way. Just don't use all 25 wafers at the same time - leave room for
picking the cassette up on the h-bar.

Anna Dubnisheva, MS  |  Research Engineer  |  BioMEMS Laboratory   |  BME
Department | Cleveland Clinic |  9500 Euclid Ave. ND20 |  Cleveland OH 4419


-----Original Message-----
From: Konstantin Glukh [ mailto:[email protected]]
Sent: Wednesday, November 19, 2008 8:45 AM
To: General MEMS discussion
Subject: [mems-talk] Wet processing cassettes that hold wafers in
horizontal position

I wonder if anyone knows a vendor of Teflon wet processing cassettes
that hold wafers in horizontal position during the etch. Thanks a lot
in advance.