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MEMSnet Home: MEMS-Talk: Silicon_Glass Fusion Bonding
Silicon_Glass Fusion Bonding
2009-02-10
jingru zhang
2009-02-10
Joseph Grogan
2009-02-10
jingru zhang
2009-02-10
Bill Moffat
2009-02-10
Xiaoguang Liu
2009-02-10
Bill Moffat
2009-02-10
jingru zhang
2009-02-11
Shay Kaplan
2009-02-11
Joseph Grogan
2009-02-12
Brubaker Chad
2009-02-12
shay kaplan
2009-02-12
Gareth Jenkins
2009-02-12
Roger Shile
2009-02-13
jingru zhang
2009-02-13
Roger Shile
2009-02-13
Reza Rashidi
2009-02-13
Joseph Grogan
Silicon_Glass Fusion Bonding
jingru zhang
2009-02-10
Hi Joe,

I am trying to bond glass and silicon by fushion bonding in a furnace, I
raised the temperature up gradually to the annealing temperature of glass
(around 600 Degree C). I used to put an alumina block (not heavy) on the top
to press glass and silicon together. few of the glass area adhered to the
silicon but most of them didn't.

2009/2/10 Joseph Grogan 

> In order to get more useful feedback, can you provide more information
> about how you're trying to do this bond? Do you mean room temperature direct
> bonding, or are you applying heat and pressure? If so then how, how much,
> how long, etc?
>
> -Joe Grogan
>
reply
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