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MEMSnet Home: MEMS-Talk: pattern on 3by3mm Si Chip
pattern on 3by3mm Si Chip
2009-02-11
LIN LI
2009-02-11
Bill Moffat
2009-02-11
Wilson, Thomas
2009-02-12
eowin rohan
pattern on 3by3mm Si Chip
LIN LI
2009-02-11
Hi,

Is there a good way to spin coat Photoresist and pattern the metal on a just
3by3 silicon chip?
I'm having difficulty in getting uniform coating on the small chip.

Thanks.

--
Lin Li
reply
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