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MEMSnet Home: MEMS-Talk: Silicon_Glass Fusion Bonding
Silicon_Glass Fusion Bonding
2009-02-10
jingru zhang
2009-02-10
Joseph Grogan
2009-02-10
jingru zhang
2009-02-10
Bill Moffat
2009-02-10
Xiaoguang Liu
2009-02-10
Bill Moffat
2009-02-10
jingru zhang
2009-02-11
Shay Kaplan
2009-02-11
Joseph Grogan
2009-02-12
Brubaker Chad
2009-02-12
shay kaplan
2009-02-12
Gareth Jenkins
2009-02-12
Roger Shile
2009-02-13
jingru zhang
2009-02-13
Roger Shile
2009-02-13
Reza Rashidi
2009-02-13
Joseph Grogan
Silicon_Glass Fusion Bonding
jingru zhang
2009-02-13
Hi Roger,

Would you please specify the voltage that you used for bonding? Is that the
same as Gareth mentioned? Thank you.

On Thu, Feb 12, 2009 at 5:31 PM, Roger Shile  wrote:

> The first time I did an anodic bond I used a hot plate and DC power
> supply that were lying around.  Just to be cute I used a coat hanger as
> an anode.
>
> The bonds were as good as what I get now using a very high priced
> commercial bonder.  I still get a lot of laughs over that hot plate and
> coat hanger.
>
> Roger

--
Jingru
reply
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