Moshe
At the best it is problematic in glass versus Silicon with KOH.
We use a powder blasting method after giving up on the marginal results that
wet etching produced
Dov
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----- Original Message -----
From: "Moshe"
To: "General MEMS discussion"
Sent: Wednesday, March 04, 2009 10:08 PM
Subject: Re: [mems-talk] Looking for mask to make holes in glass
> Thank you for all the answers
> I prefer to focus on a way to made holes with wet etch.
> I there a resist so the HF do not strip it ?
> As I said I tried gold and polysilicon and the HF strip it.