How thin?

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of li shifeng
Sent: Tuesday, July 07, 2009 3:06 PM
To: [email protected]
Subject: [mems-talk] methods to hold thin glass wafers

Hi, I am working on 4" or 3" thin glass wafers. Because it is thin, glass
wafer is very easy to break during processes. I am looking for any tools or
methods to hold these thin glass wafers.

Thanks!

shifeng