If it's for evaporation of sputtering, don't touch it!

shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Nataraj
Sent: Friday, July 10, 2009 3:17 AM
To: [email protected]
Subject: [mems-talk] Frequency for changing Oil in Oil Diffusion Pumps

Dear All,

Can any one advise me, what is the frequency for changing the Oil
in Oil diffusion pumps?  Is it time based or does it depend on the
utilization of the machines.

Regards,

Nataraj Santhanam
Sputtering Section