Hi Yingtao,

good idea to keep it dry. Have you thought about store it in an exsiccator?

Regards,

Bernd

-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von Y.Tian
Gesendet: Montag, 13. Juli 2009 14:39
An: General MEMS discussion
Betreff: Re: [mems-talk] Storage of developed AZ photoresist

Hi Bernd,

Thanks for your suggestion. The AZ patterns on my samples are around tens of
micron, so, as you said the pattern will smear in nanometer scale, can I say it
should not be a problem about that? It might be difficult for me to vacuum seal
the samples because I need to use them at about few samples per week. From your
experiences, does it make sense if I keep some desiccants in the package to keep
them dry?

Thanks,
Yingtao