Madou, 
Senturia 
Minghang Bao,

hope they are  helpful.

On Thu, Sep 17, 2009 at 4:23 AM, shay kaplan  wrote:

> CRC has a three book set that covers MEMS basics.
>
> Shay

--
Yan Xin
-Pen-Tung Sah MEMS Research Center,
-Xiamen University, CHINA
XMU HOME:
http://memsc.xmu.edu.cn/mems_renchaiduiwu/XuYuan_Chen-Group/index_1.html