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MEMSnet Home: MEMS-Talk: photolithography equipment
photolithography equipment
2009-10-07
Ben Pepin
2009-10-07
Andrew Sarangan
2009-10-07
Bryan Bishop
photolithography equipment
Ben Pepin
2009-10-07
Hello all,

I am looking to purchase a few items for use in photolithography of a
Si wafer. I am needing to buy a UV source and also a "low cost" spin
coater. If anyone knows any companys or has any suggestions I would
greatly appreciate your feedback.

Thanks,
Ben Pepin
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