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MEMSnet Home: MEMS-Talk: photolithography equipment
photolithography equipment
2009-10-07
Ben Pepin
2009-10-07
Andrew Sarangan
2009-10-07
Bryan Bishop
photolithography equipment
Bryan Bishop
2009-10-07
On Wed, Oct 7, 2009 at 9:19 AM, Ben Pepin  wrote:
> I am looking to purchase a few items for use in photolithography of a
> Si wafer. I am needing to buy a UV source and also a "low cost" spin
> coater. If anyone knows any companys or has any suggestions I would
> greatly appreciate your feedback.

Maybe you could build the spin coater yourself?

http://nathan.instras.com/projects/spin-coater/index.html

- Bryan
http://heybryan.org/
1 512 203 0507
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