We've tried to make masks using the same procedure last year. We didn't get
acceptable results mostly because the photoreducing machine that we were using
was too old. Another limiting factor here is the type of the glass mask that
you're using. The results of our experiments showed that it is possible to
acheive resolutions around 5 micron.

Please let us know if you had any progress in this regard.

Behrouz Nikpour