Hi All,

i need to pattern S1813 with vertical sidewalls, but at the present time i
get an angle of about 54 deg. Awful...
My maskaligner is an old karl suss.

Here is my procedure:
-spinning of S1813
-soft bake 3 min at 115 deg
-photolitography in contact mode (150mJ)
-development in MF319 (about 45 seconds)
-hard bake 15 min at 115.

Any suggestion to improve the sidewall angle ?

Best regards,
Andrea